Browsing by author "Kovacs, F."
Now showing items 1-10 of 10
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A study in interactions of plasmas and wet cleans with ULK materials
Xu, Kaidong; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Lux, Marcel; Kraus, Harald; Henry, Sally - Ann; Archer, L.; Gaulhofer, E.; Kovacs, F.; Dalmer, M.; Mertens, Paul; Luo, S. J; Han, Q. Y (2007) -
Drying of hydrophobic surfaces - one of the keys for future technologies
Kraus, Harald; Snow, Jim; Mertens, Paul; Holsteyns, Frank; Kenis, Karine; Kovacs, F.; Fichtl, S. (2004) -
Effect of plasma treatments on the compatibility of ULK to wet cleaning
Xu, Kaidong; Kesters, Els; Vereecke, Guy; Lux, Marcel; Kraus, H; Henry, S.A.; Archer, L; Gaulhofer, E.; Kovacs, F.; Dalmer, M; Schmidt, T; Leunissen, Peter; Mertens, Paul; Luo, S.J.; Han, Q. Y. (2007) -
Etching of HfO2, deposited on LPCVD Si3N4, and cleaning of Hf residues
Kraus, Harald; Snow, Jim; Van Doorne, Patrick; Mertens, Paul; Kovacs, F. (2003) -
Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Doumen, Geert; Fyen, Wim; Mertens, Paul; Heyns, Marc; Vinckier, Chris; Fransaer, J.; Kovacs, F. (2005) -
Measurement of nanoparticles on silicon wafer surface using haze signal by light scattering
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Holsteyns, Frank; Kraus, H.; Mertens, Paul; Vinckier, Chris; Kovacs, F. (2005) -
Removing metal gate process residues
Snow, Jim; Fyen, Wim; Mertens, Paul; Kraus, Harald; Kovacs, F.; Vermeyen, K. (2004) -
Selective etching of SiGe for removal of dummy layers in fully silicided gate artchitectures
Snow, Jim; Vos, Rita; Kottantharayil, Anil; Kraus, Harald; Xu, Kaidong; Grinninger, F.; Wagner, G.; Kovacs, F.; Mertens, Paul (2005) -
Selective removal of Ni for salicidation and fully silicided gates
Kraus, K.; Fano Leston, V.; Snow, Jim; Xu, Kaidong; de Potter de ten Broeck, Muriel; Lauwers, Anne; Mertens, Paul; Kovacs, F. (2005) -
Selective wet etching of Hf-based layers on a single-wafer spin processor
Kraus, Harald; Kovacs, F.; Snow, Jim; Claes, Martine; Paraschiv, Vasile; Vos, Rita; Mertens, Paul; De Gendt, Stefan; Heyns, Marc (2004)