Browsing by author "Del-Agua-Bomiquel, J.I."

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Probing doping conformality in fin shaped field effect transistor structures using resistors

Vandervorst, Wilfried; Jurczak, Gosia; Everaert, Jean-Luc; Pawlak, B.J.; Duffy, Ray; Del-Agua-Bomiquel, J.I.; Poon, T. (2008)