Authors

Vandervorst, Wilfried; Jurczak, Gosia; Everaert, Jean-Luc; Pawlak, B.J.; Duffy, Ray; Del-Agua-Bomiquel, J.I.; Poon, T.

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

26

Title

Probing doping conformality in fin shaped field effect transistor structures using resistors

Publication type

Journal article