Publication:
Probing doping conformality in fin shaped field effect transistor structures using resistors
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Jurczak, Gosia | |
| dc.contributor.author | Everaert, Jean-Luc | |
| dc.contributor.author | Pawlak, B.J. | |
| dc.contributor.author | Duffy, Ray | |
| dc.contributor.author | Del-Agua-Bomiquel, J.I. | |
| dc.contributor.author | Poon, T. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Jurczak, Gosia | |
| dc.contributor.imecauthor | Everaert, Jean-Luc | |
| dc.date.accessioned | 2021-10-17T12:13:46Z | |
| dc.date.available | 2021-10-17T12:13:46Z | |
| dc.date.issued | 2008 | |
| dc.identifier.issn | 1071-1023 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14707 | |
| dc.source.beginpage | 396 | |
| dc.source.endpage | 401 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 26 | |
| dc.title | Probing doping conformality in fin shaped field effect transistor structures using resistors | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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