Browsing by author "Blankenship, David"

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Comparative stochastic process variation bands for N7, N5, and N3 at EUV

Vaglio Pret, Alessandro; Graves, Trey; Blankenship, David; Bai, Kunlun; Robertson, Stewart; De Bisschop, Peter; Biafore, J. (2018)
Statistical simulation of resist at EUV and ArF

Biafore, John; Smith, Mark; Mack, Chris A.; Thackeray, James; Gronheid, Roel; Robertson, Stewart; Graves, Trey; Blankenship, David (2009)