Publication:

Comparative stochastic process variation bands for N7, N5, and N3 at EUV

Date

2018

Proceedings Paper

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Author(s)

Vaglio Pret, Alessandro

;

;

Blankenship, David

;

;

Robertson, Stewart

;

De Bisschop, Peter

;

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1915 since deposited on 2021-10-26

Acq. date: 2026-02-26