Browsing by author "Anderson, Nigel"
Now showing items 1-4 of 4
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Gas stream analysis and PFC recovery in a semiconductor process
Van Hoeymissen, Jan; Daniels, Michael; Anderson, Nigel; Fyen, Wim; Heyns, Marc (1997) -
Generation and transport of corrosion products in HCl gas lines
Vereecke, Guy; Anderson, Nigel; Elsmore, Chris; Espitalier-Noel, P.; Heyns, Marc (1996) -
Generation and transport of corrosion products in HCL gas lines
Vereecke, Guy; Heyns, Marc; Anderson, Nigel; Elsmore, Chris; Espitalier-Noel, P. (1997) -
Metallic contaminants generation from tubing during start-up and following moisture upsets in HCl distribution systems
Anderson, Nigel; Vereecke, Guy; Heyns, Marc; Espitalier-Noel, P. (1997)