Authors

Vereecke, Guy; Anderson, Nigel; Elsmore, Chris; Espitalier-Noel, P.; Heyns, Marc

Conference

Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

Generation and transport of corrosion products in HCl gas lines

Publication type

Proceedings paper

Embargo date

9999-12-31