Browsing by author "Horsfall, Alton B."

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In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation

Wilson, Chris; Volders, Henny; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, Alton B.; O'Neill, Anthony G.; Tokei, Zsolt (2010)
In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiation

Wilson, Chris; Volders, Henny; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, Alton B.; O'Neill, Anthony G. (2009)