Authors

Wilson, Chris; Volders, Henny; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, Alton B.; O'Neill, Anthony G.; Tokei, Zsolt

DOI

10.1016/j.mee.2009.06.023

ISSN

0167-9317

Issue

3

Journal

Microelectronic Engineering

Volume

87

Title

In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation

Publication type

Journal article

Embargo date

9999-12-31