Browsing by author "Oshima, Nagayasu"

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Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams

Uedono, Akira; Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Witters, Thomas; Conard, Thierry; Baklanov, Mikhaïl; Van Elshocht, Sven; Oshima, Nagayasu; Suzuki, Ryoichi (2013)
Vacancy-Type Defects and Oxygen Incorporation in NiAl for Advanced Interconnects Probed by Monoenergetic Positron Beams and Atom Probe Tomography

Uedono, Akira; Fleischmann, Claudia; Soulie, Jean-Philippe; Ayyad, Mustafa; Scheerder, Jeroen; Adelmann, Christoph; Uzuhashi, Jun; Ohkubo, Tadakatsu; Michishio, Koji; Oshima, Nagayasu; Ishibashi, Shoji (2024)