Now showing items 1-2 of 2

    • Integration challenges for multi-gate devices 

      Collaert, Nadine; Brus, Stephan; De Keersgieter, An; Dixit, Abhisek; Ferain, Isabelle; Goodwin, Michael; Kottantharayil, Anil; Rooyackers, Rita; Verheyen, Peter; Yim, Yong Sik; Zimmerman, Paul; Beckx, Stephan; Degroote, Bart; Demand, Marc; Kim, Myeong-Cheol; Kunnen, Eddy; Locorotondo, Sabrina; Mannaert, Geert; Neuilly, Francois; Shamiryan, Denis; Baerts, Christina; Ercken, Monique; Laidler, David; Leys, Frederik; Loo, Roger; Lisoni, Judit; Snow, Jim; Vos, Rita; Boullart, Werner; Pollentier, Ivan; De Gendt, Stefan; De Meyer, Kristin; Jurczak, Gosia; Biesemans, Serge (2005)
    • Tall triple-gate device with TiN/HfO2 gate stack 

      Collaert, Nadine; Demand, Marc; Ferain, Isabelle; Lisoni, Judit; Singanamalla, Raghunath; Zimmerman, Paul; Yim, Yong Sik; Schram, Tom; Mannaert, Geert; Goodwin, Michael; Hooker, Jacob; Neuilly, Francois; Kim, Myeong-Cheol; De Meyer, Kristin; De Gendt, Stefan; Boullart, Werner; Jurczak, Gosia; Biesemans, Serge (2005)