Browsing by author "Vatel, Oliver"

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Surface reconstruction of hydrogen annealed (100) silicon

Bender, Hugo; Verhaverbeke, Steven; Caymax, Matty; Vatel, Oliver; Heyns, Marc (1994)
The IMEC Clean concept : an advanced wafer cleaning technology

Meuris, Marc; Verhaverbeke, Steven; Mertens, Paul; Schmidt, Harald; Rotondaro, Antonio; Heyns, Marc; Depas, Michel; Philipossian, A.; Vatel, Oliver (1994)