Publication:

The IMEC Clean concept : an advanced wafer cleaning technology

Date

1994
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Author(s)

Meuris, Marc  
;
Verhaverbeke, Steven
;
Mertens, Paul  
;
Schmidt, Harald
;
Rotondaro, Antonio
;
Heyns, Marc  
;
Depas, Michel
;
Philipossian, A.
;
Vatel, Oliver

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3 since deposited on 2021-09-29
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2250 since deposited on 2021-09-29
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