Browsing by author "Ausschnitt, Kit"
Now showing items 1-3 of 3
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Image contrast metrology for EUV lithography
Brunner, Timothy A.; Truffert, Vincent; Ausschnitt, Kit; Kissoon, Nicola N.; Duriau, Edouard; Jonckers, Tom; van Look, Lieve; Franke, Joern-Holger (2022-09-29) -
Machine Learning on Multiplexed Optical Metrology Pattern Shift Response Targets to Predict Electrical Properties
Ashby, Tom; Truffert, Vincent; Cerbu, Dorin; Ausschnitt, Kit; Charley, Anne-Laure; Verachtert, Wilfried; Wuyts, Roel (2024) -
Novel monitoring of EUV litho cluster for manufacturing insertion
Truffert, Vincent; Ausschnitt, Kit; Nair, Vineet Vijayakrishnan; D'have, Koen (2020)