Browsing by author "Eurlings, Mark"
Now showing items 1-2 of 2
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Deep ultraviolet out-of-band contribution in extreme ultraviolet lithography: predictions and experiments
Lorusso, Gian; Davydova, Natalia; Eurlings, Mark; Kaya, Cemil; Peng, Yue; Feenstra, Kees; Fedynyshyn, Theodore H.; Natt, Oliver; Huber, Peter; Zaczek, Christoph; Young, Stuart; Graeupner, Paul; Hendrickx, Eric (2011) -
Double dipole lithography for 65-nm node and beyond: a technology readiness review
Hsu, Stephen; Eurlings, Mark; Hendrickx, Eric; Van Den Broeke, Douglas J.; Chiou, Tsann-Bim; Fung Chen, J.; Laidig, Thomas L.; Shi, Xuelong; Finders, Jo (2004-08)