Browsing by author "Morrison, Troy"
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Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications
Philipsen, Vicky; Leunissen, Peter; De Ruyter, Rudi; Jonckheere, Rik; Martin, Patrick; Wakefield, Clare; Johnson, Stephen; Cangemi, Mike; Buxbaum, Alex; Morrison, Troy (2005)