Browsing by author "Fischer, A."

Now showing items 1-1 of 1

Determination of stress in shallow trench isolation for deep submicron MOS devices by UV Raman spectroscopy

Dombrowski, Kai; Fischer, A.; Dietrich, B.; De Wolf, Ingrid; Bender, Hugo; Pochet, Sandrine; Simons, Veerle; Rooyackers, Rita; Badenes, Gonçal; Stuer, Cindy; Van Landuyt, J. (1999)