Browsing by author "Ger, Avron"

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Scatterometry and AFM measurement combination for area selective deposition process characterization

Saib, Mohamed; Moussa, Alain; Charley, Anne-Laure; Leray, Philippe; Hung, Joey; Koret, Roy; Turovets, Igor; Ger, Avron; Deng, Shaoren; Illiberi, Andrea; Maes, Jan Willem; Woodworth, Gabriel; Strauss, Michael (2019)
Scatterometry and X-ray metrology for in-line control of spin-transfer torque magnetic random access memory (STT-MRAM) devices

Crotti, Davide; Swerts, Johan; Yasin, Farrukh; Jossart, Nico; Souriau, Laurent; Kundu, Shreya; Urenski, Ronen; Urbanowicz, Adam M.; Koret, Roy; Figueiro, Nivea; Sendelbach, Matthew; Lee, Wei Ti; Shah, Kavita; Larson, Tom; Ger, Avron; Wolfling, Shay; Kar, Gouri Sankar (2018)