Authors

Saib, Mohamed; Moussa, Alain; Charley, Anne-Laure; Leray, Philippe; Hung, Joey; Koret, Roy; Turovets, Igor; Ger, Avron; Deng, Shaoren; Illiberi, Andrea; Maes, Jan Willem; Woodworth, Gabriel; Strauss, Michael

Conference

Metrology, Inspection, and Process Control for Microlithography XXXIII

Title

Scatterometry and AFM measurement combination for area selective deposition process characterization

Publication type

Proceedings paper

Embargo date

9999-12-31