Publication:

Scatterometry and AFM measurement combination for area selective deposition process characterization

Date

2019
Proceedings Paper
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Author(s)

Saib, Mohamed  
;
Moussa, Alain  
;
Charley, Anne-Laure  
;
Leray, Philippe  
;
Hung, Joey  
;
Koret, Roy
;
Turovets, Igor
;
Ger, Avron
;
Deng, Shaoren  
;
Illiberi, Andrea  
;
Maes, Jan Willem
;
Woodworth, Gabriel
;
Strauss, Michael

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Abstract

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