Publication:

Scatterometry and AFM measurement combination for area selective deposition process characterization

Date

2019

Proceedings Paper

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Files

43084.pdf 1.18 MB

Author(s)

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Charley, Anne-Laure

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Leray, Philippe

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Illiberi, Andrea

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Maes, Jan Willem

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Woodworth, Gabriel

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Strauss, Michael

Metrics

2025 since deposited on 2021-10-27

Acq. date: 2025-12-11