Browsing by author "Dussarrat, Christian"

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Low-k integration: Gas screening for cryogenic etching and damage mitigation

Chanson, Romain; Dussart, Remi; Tillocher, Thomas; Lefaucheux, Philippe; Dussarrat, Christian; de Marneffe, Jean-Francois (2019)
Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

Zhang, Liping; de Marneffe, Jean-Francois; Leroy, Florian; Lefaucheux, Philippe; Tillocher, Thomas; Dussart, Remi; Maekawa, Kaoru; yatsuda, koichi; Dussarrat, Christian; Goodyear, Andy; Cooke, Mike; De Gendt, Stefan; Baklanov, Mikhaïl (2016)