Browsing by imec author "7f1031ea275a6ac2ce9d06ced36e697bc0538251"
Now showing items 1-5 of 5
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Chlorine-Resistant Epoxide-Based Membranes for Sustainable Water Desalination
Verbeke, Rhea; Davenport, Douglas M.; Stassin, Timothee; Eyley, Samuel; Dickmann, Marcel; Cruz, Alexander John; Dara, Praveen; Ritt, Cody L.; Bogaerts, Caroline; Egger, Werner; Ameloot, Rob; Meersschaut, Johan; Thielemans, Wim; Koeckelberghs, Guy; Eimelech, Menachem; Vankelecom, Ivo F,J. (2021) -
Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
Peter, Antony; Sepulveda Marquez, Alfonso; Meersschaut, Johan; Dara, Praveen; Blanquart, Timothee; Tomomi, Takayama; Taishi, Ebisudani; Elichiro, Shiba; Kimura, Yosuke; Van Gompel, Sander; Morin, Pierre (2022) -
Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
Tomomi, Takayama; Taishi, Ebisudani; Eiichiro, Shiba; Sepulveda Marquez, Alfonso; Blanquart, Timothee; Kimura, Yosuke; Subramanian, Sujith; Baudot, Sylvain; Briggs, Basoene; Gupta, Anshul; Veloso, Anabela; Capogreco, Elena; Mertens, Hans; Meersschaut, Johan; Conard, Thierry; Dara, Praveen; Geypen, Jef; Martinez Alanis, Gerardo Tadeo; Batuk, Dmitry; Demuynck, Steven; Morin, Pierre (2021) -
Influence of composition of SiCN as interfacial layer on plasma activated direct bonding
Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Phommahaxay, Alain; Verdonck, Patrick; Meersschaut, Johan; Dara, Praveen; Sleeckx, Erik; Miller, Andy; Beyer, Gerald; Beyne, Eric (2019) -
Influence of composition of SiCN for surface activated bonding
Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Phommahaxay, Alain; Visker, Jakob; Verdonck, Patrick; Meersschaut, Johan; Dara, Praveen; Sleeckx, Erik; Miller, Andy; Beyne, Eric (2018)