Publication:

Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

Date

2019
Journal article
https://doi.org/10.1149/2.0241906jss
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

41817.pdf 909.32 KB

Author(s)

Inoue, Fumihiro  
;
Peng, Lan  
;
Iacovo, Serena  
;
Phommahaxay, Alain  
;
Verdonck, Patrick  
;
Meersschaut, Johan  
;
Dara, Praveen  
;
Sleeckx, Erik  
;
Miller, Andy  
;
Beyer, Gerald  
;
Beyne, Eric  

Journal

ECS Journal of Solid State Science and Technology

Abstract

Description

Statistics

Views

2020 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2026-09-20

Citations

Statistics

Views

2020 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2026-09-20

Citations