Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

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Authors

Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Phommahaxay, Alain; Verdonck, Patrick; Meersschaut, Johan; Dara, Praveen; Sleeckx, Erik; Miller, Andy; Beyer, Gerald; Beyne, Eric

DOI

10.1149/2.0241906jss

ISSN

2162-8769

Issue

6

Journal

ECS Journal of Solid State Science and Technology

Volume

8

Title

Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

Publication type

Journal article

Embargo date

9999-12-31

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