Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Phommahaxay, Alain; Verdonck, Patrick; Meersschaut, Johan; Dara, Praveen; Sleeckx, Erik; Miller, Andy; Beyer, Gerald; Beyne, Eric

doi:10.1149/2.0241906jss

Publication:

Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

Date

2019

Journal article

https://doi.org/10.1149/2.0241906jss

Simple item page Full metadata Statistics

Files

41817.pdf 909.32 KB

Author(s)

;

;

;

;

;

;

;

;

;

;

Journal

ECS Journal of Solid State Science and Technology

Statistics

2011 since deposited on 2021-10-27

1last month

1last week

Acq. date: 2026-03-17

Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations