Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Phommahaxay, Alain; Verdonck, Patrick; Meersschaut, Johan; Dara, Praveen; Sleeckx, Erik; Miller, Andy; Beyer, Gerald; Beyne, Eric

doi:10.1149/2.0241906jss

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Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

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2019

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https://doi.org/10.1149/2.0241906jss

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ECS Journal of Solid State Science and Technology

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Influence of composition of SiCN as interfacial layer on plasma activated direct bonding

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