Browsing by author "Wu, Stewart"
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Improving OPC Model Accuracy of Dry Resist for Low k1 EUV Patterning
Xu, Dongbo; Gillijns, Werner; Wu, Stewart; Jambaldinni, Shruti; Kam, Benjamin; De Silva, Anuja; Fenger, Germain (2024) -
Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection
Dey, Bappaditya; Wu, Stewart; Das, Sayantan; Khalil, Kasem; Halder, Sandip; Leray, Philippe; Samir, Bhamidipati; Ahi, Kiarash; Pereira, Mark; Fenger, Germain; Bayoumi, Magdy A. (2021)