Authors
Dey, Bappaditya;
Wu, Stewart;
Das, Sayantan;
Khalil, Kasem;
Halder, Sandip;
Leray, Philippe;
Samir, Bhamidipati;
Ahi, Kiarash;
Pereira, Mark;
Fenger, Germain;
Bayoumi, Magdy A.
EISBN
978-1-5106-4553-0
ISBN
978-1-5106-4552-3
ISSN
0277-786X
Conference
International Conference on Extreme Ultraviolet Lithography
Journal
Proceedings Volume 11854, International Conference on Extreme Ultraviolet Lithography 2021
Volume
11854
Title
Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection
Publication type
Proceedings paper