Publication:

Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2600945

Simple item page Full metadata Statistics

Author(s)

Dey, Bappaditya

;

;

;

;

;

Leray, Philippe

;

Samir, Bhamidipati

;

;

;

Fenger, Germain

;

Bayoumi, Magdy A.

Journal

Proceedings Volume 11854, International Conference on Extreme Ultraviolet Lithography 2021

Metrics

1703 since deposited on 2022-05-22

Acq. date: 2025-12-12