Publication:

Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2600945
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dc.contributor.authorDey, Bappaditya
dc.contributor.authorWu, Stewart
dc.contributor.authorDas, Sayantan
dc.contributor.authorKhalil, Kasem
dc.contributor.authorHalder, Sandip
dc.contributor.authorLeray, Philippe
dc.contributor.authorSamir, Bhamidipati
dc.contributor.authorAhi, Kiarash
dc.contributor.authorPereira, Mark
dc.contributor.authorFenger, Germain
dc.contributor.authorBayoumi, Magdy A.
dc.contributor.imecauthorDey, Bappaditya
dc.contributor.imecauthorDas, Sayantan
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorLeray, Philippe
dc.contributor.orcidimecDey, Bappaditya::0000-0002-0886-137X
dc.contributor.orcidimecDas, Sayantan::0000-0002-3031-0726
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecLeray, Philippe::0000-0002-1086-270X
dc.date.accessioned2022-07-11T08:18:11Z
dc.date.available2022-05-22T02:19:15Z
dc.date.available2022-07-08T09:26:33Z
dc.date.available2022-07-11T08:18:11Z
dc.date.issued2021
dc.identifier.doi10.1117/12.2600945
dc.identifier.eisbn978-1-5106-4553-0
dc.identifier.isbn978-1-5106-4552-3
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39878
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.conferenceInternational Conference on Extreme Ultraviolet Lithography
dc.source.conferencedateSEP 27-OCT 01, 2021
dc.source.conferencelocationOnline only
dc.source.journalProceedings Volume 11854, International Conference on Extreme Ultraviolet Lithography 2021
dc.source.numberofpages15
dc.source.volume11854
dc.title

Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection

dc.typeProceedings paper
dspace.entity.typePublication
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