Publication:

Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2600945

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Author(s)

Dey, Bappaditya

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Leray, Philippe

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Samir, Bhamidipati

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Fenger, Germain

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Bayoumi, Magdy A.

Journal

Proceedings Volume 11854, International Conference on Extreme Ultraviolet Lithography 2021

Statistics

1705 since deposited on 2022-05-22

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Acq. date: 2026-02-27