Publication:

Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2600945
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Author(s)

Dey, Bappaditya  
;
Wu, Stewart
;
Das, Sayantan  
;
Khalil, Kasem
;
Halder, Sandip  
;
Leray, Philippe  
;
Samir, Bhamidipati
;
Ahi, Kiarash
;
Pereira, Mark
;
Fenger, Germain
;
Bayoumi, Magdy A.

Journal

Proceedings Volume 11854, International Conference on Extreme Ultraviolet Lithography 2021

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1701 since deposited on 2022-05-22
Acq. date: 2025-10-23

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1701 since deposited on 2022-05-22
Acq. date: 2025-10-23

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