Browsing by author "Petermann, Claire"

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Dielectric properties of spin-on metal oxides and their applications for 2D semiconductor devices

Sayan, Safak; Lin, Dennis; Asselberghs, Inge; Chiappe, Daniele; Sutar, Surajit; Radu, Iuliana; Thean, Aaron; Petermann, Claire; Hong, Sung Eun (2016)
Spin on metal oxide materials for N7 and beyond patterning applications

Mannaert, Geert; Altamirano Sanchez, Efrain; Hopf, Toby; Sebaai, Farid; Lorant, Christophe; Petermann, Claire; Hong, S-E; Mullen, S; Wolfer, E; Mckenzie, D; Yao, H; Rahman, D; Cho, J-Y; Padmanaban, M; Piumi, Daniele (2017)