Spin on metal oxide materials for N7 and beyond patterning applications

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Authors
Mannaert, Geert; Altamirano Sanchez, Efrain; Hopf, Toby; Sebaai, Farid; Lorant, Christophe; Petermann, Claire; Hong, S-E; Mullen, S; Wolfer, E; Mckenzie, D; Yao, H; Rahman, D; Cho, J-Y; Padmanaban, M; Piumi, Daniele
Conference
Advanced Etch Technology for Nanopatterning VI
Title
Spin on metal oxide materials for N7 and beyond patterning applications
Publication type
Proceedings paper
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