Publication:

Spin on metal oxide materials for N7 and beyond patterning applications

Date

2017

Proceedings Paper

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Author(s)

Mannaert, Geert

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Altamirano Sanchez, Efrain

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Lorant, Christophe

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Petermann, Claire

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Metrics

1943 since deposited on 2021-10-24

Acq. date: 2025-12-15