Publication:

Spin on metal oxide materials for N7 and beyond patterning applications

Date

2017
Proceedings Paper
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Author(s)

Mannaert, Geert  
;
Altamirano Sanchez, Efrain  
;
Hopf, Toby  
;
Sebaai, Farid  
;
Lorant, Christophe  
;
Petermann, Claire  
;
Hong, S-E
;
Mullen, S
;
Wolfer, E
;
Mckenzie, D
;
Yao, H
;
Rahman, D
;
Cho, J-Y
;
Padmanaban, M
;
Piumi, Daniele  

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1946 since deposited on 2021-10-24
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Acq. date: 2026-02-24

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