Browsing by author "Gemmink, Jan-Willem"

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Characterization and control of dynamic lens heating effects under high-volume manufacturing conditions

Bekaert, Joost; Van Look, Lieve; Vandenberghe, Geert; Van Adrichem, Paul; Maslow, Mark J.; Gemmink, Jan-Willem; Cao, Hua; Hunsche, Stefan; Neumann, Jens Timo; Wolf, Alexander (2011)
Optical proximity stability control of ArF immersion clusters

Van Look, Lieve; Bekaert, Joost; D'have, Koen; Laenens, Bart; Vandenberghe, Geert; Cheng, Shaunee; Schreel, Koen; Gemmink, Jan-Willem (2011)