Optical proximity stability control of ArF immersion clusters

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Authors
Van Look, Lieve; Bekaert, Joost; D'have, Koen; Laenens, Bart; Vandenberghe, Geert; Cheng, Shaunee; Schreel, Koen; Gemmink, Jan-Willem
Conference
Optical Microlithography XXIV
Title
Optical proximity stability control of ArF immersion clusters
Publication type
Proceedings paper
Embargo date
9999-12-31
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