Browsing by author "Takeuchi, Ichiro"

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Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology

Chang, Kao-Shuo; Green, Martin L.; Hattrick-Simpers, Jason R.; Takeuchi, Ichiro; Suehle, John S.; Celik, Ozgur; De Gendt, Stefan (2008-10)