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Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology
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1835 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-09
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Views
1835 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-09
Citations