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Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology
Publication:
Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology
Date
2008-10
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chang, Kao-Shuo
;
Green, Martin L.
;
Hattrick-Simpers, Jason R.
;
Takeuchi, Ichiro
;
Suehle, John S.
;
Celik, Ozgur
;
De Gendt, Stefan
Journal
IEEE Transactions on Electron Devices
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1833
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1833
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations