Publication:
Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1836 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-01-11
Citations
Metrics
Views
1836 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-01-11
Citations