Publication:
Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology
Date
| dc.contributor.author | Chang, Kao-Shuo | |
| dc.contributor.author | Green, Martin L. | |
| dc.contributor.author | Hattrick-Simpers, Jason R. | |
| dc.contributor.author | Takeuchi, Ichiro | |
| dc.contributor.author | Suehle, John S. | |
| dc.contributor.author | Celik, Ozgur | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-17T06:28:51Z | |
| dc.date.available | 2021-10-17T06:28:51Z | |
| dc.date.issued | 2008-10 | |
| dc.identifier.issn | 0018-9383 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13497 | |
| dc.source.beginpage | 2641 | |
| dc.source.endpage | 2647 | |
| dc.source.journal | IEEE Transactions on Electron Devices | |
| dc.source.volume | 55 | |
| dc.title | Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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