Browsing by author "Becker, L."
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Epitaxial Growth of Active Si on Top of SiGe Etch Stop Layer in View of 3D Device Integration
Becker, L.; Storck, P.; Loo, Roger; Jourdain, Anne; Rengo, Gianluca; Porret, Clément; Hikavyy, Andriy; Liebens, Maarten; Beyer, Gerald; Beyne, Eric (2021)