Publication:
Epitaxial Growth of Active Si on Top of SiGe Etch Stop Layer in View of 3D Device Integration
Loading...
Journal
Abstract
Description
Metrics
Views
1925 since deposited on 2022-03-02
1last month
Acq. date: 2026-01-06
Citations
Metrics
Views
1925 since deposited on 2022-03-02
1last month
Acq. date: 2026-01-06
Citations