Publication:
Epitaxial Growth of Active Si on Top of SiGe Etch Stop Layer in View of 3D Device Integration
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1927 since deposited on 2022-03-02
2last month
Acq. date: 2026-01-26
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Statistics
Views
1927 since deposited on 2022-03-02
2last month
Acq. date: 2026-01-26
Citations