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Articles
Epitaxial Growth of Active Si on Top of SiGe Etch Stop Layer in View of 3D Device Integration
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Epitaxial Growth of Active Si on Top of SiGe Etch Stop Layer in View of 3D Device Integration
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Date
2021
Journal article
https://doi.org/10.1149/2162-8777/abd885
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Becker, L.
;
Storck, P.
;
Loo, Roger
;
Jourdain, Anne
;
Rengo, Gianluca
;
Porret, Clément
;
Hikavyy, Andriy
;
Liebens, Maarten
;
Beyer, Gerald
;
Beyne, Eric
Journal
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
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1924
since deposited on 2022-03-02
Acq. date: 2025-12-11
Citations
Metrics
Views
1924
since deposited on 2022-03-02
Acq. date: 2025-12-11
Citations