Browsing by author "Mac Geary, M. J."

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Chemicals for the Chlorination of Gate Oxides

Mac Geary, M. J.; Boeglin, H. J.; Lubbers, A.; Mertens, Paul; Vermeire, Bert (1994)
Effect of different chlorine sources during gate oxidation

Vermeire, Bert; Mertens, Paul; Mac Geary, M. J.; Kenis, Karine; Heyns, Marc; Schaekers, Marc; Lubbers, A. (1994)