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Conference contributions
Chemicals for the Chlorination of Gate Oxides
Publication:
Chemicals for the Chlorination of Gate Oxides
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Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mac Geary, M. J.
;
Boeglin, H. J.
;
Lubbers, A.
;
Mertens, Paul
;
Vermeire, Bert
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Acq. date: 2026-02-25
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2041
since deposited on 2021-09-29
1
last month
Acq. date: 2026-02-25
Citations