Chemicals for the Chlorination of Gate Oxides

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Authors
Mac Geary, M. J.; Boeglin, H. J.; Lubbers, A.; Mertens, Paul; Vermeire, Bert
Conference
Vacuum and Semiconductor Processing Conference
Title
Chemicals for the Chlorination of Gate Oxides
Publication type
Proceedings paper
Embargo date
9999-12-31
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