Browsing by author "Yamamoto, Hiroki"
Now showing items 1-3 of 3
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Role of metal sensitizers for sensitivity improvement in EUV chemically amplified resist
Yamamoto, Hiroki; Vesters, Yannick; Jiang, Jing; De Simone, Danilo; Vandenberghe, Geert; Kozawa, Takahiro (2019-01) -
Sensitizers in EUV chemically amplified resist: mechanism of sensitivity improvement
Vesters, Yannick; Jiang, Jing; Yamamoto, Hiroki; De Simone, Danilo; Kozawa, Takahiro; De Gendt, Stefan; Vandenberghe, Geert (2018) -
Sensitizers in extreme ultraviolet chemically amplified resists: mechanism of sensitivity improvement
Vesters, Yannick; Jiang, Jing; Yamamoto, Hiroki; De Simone, Danilo; Kozawa, Takahiro; De Gendt, Stefan; Vandenberghe, Geert (2019-12)