Authors

Vesters, Yannick; Jiang, Jing; Yamamoto, Hiroki; De Simone, Danilo; Kozawa, Takahiro; De Gendt, Stefan; Vandenberghe, Geert

ISSN

1932-5150

Issue

4

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

17

Title

Sensitizers in extreme ultraviolet chemically amplified resists: mechanism of sensitivity improvement

Publication type

Journal article