Publication:
Sensitizers in extreme ultraviolet chemically amplified resists: mechanism of sensitivity improvement
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1854 since deposited on 2021-10-27
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Acq. date: 2025-10-24
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Views
1854 since deposited on 2021-10-27
417item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations