Browsing by author "Clarysse, Marc"
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Characterization and control of organic airborne contamination in lithographic processing
Dallas, Andrew J.; Graham, Kristine M.; Clarysse, Marc; Fonderie, Vic (2002) -
New SPM concept for accurate and repeatable tip positioning
Duriau, Edouard; Clarysse, Marc; Moussa, Alain; Vanhaeren, Danielle; Eyben, Pierre; Hantschel, Thomas; Vandervorst, Wilfried (2009)