New SPM concept for accurate and repeatable tip positioning

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Authors

Duriau, Edouard; Clarysse, Marc; Moussa, Alain; Vanhaeren, Danielle; Eyben, Pierre; Hantschel, Thomas; Vandervorst, Wilfried

ISSN

0167-9317

Issue

4_6

Journal

Microelectronic Engineering

Volume

86

Title

New SPM concept for accurate and repeatable tip positioning

Publication type

Journal article

Embargo date

9999-12-31

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