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New SPM concept for accurate and repeatable tip positioning
Publication:
New SPM concept for accurate and repeatable tip positioning
Date
2009
Journal article
Simple item page
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19796.pdf
444.98 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Duriau, Edouard
;
Clarysse, Marc
;
Moussa, Alain
;
Vanhaeren, Danielle
;
Eyben, Pierre
;
Hantschel, Thomas
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
Abstract
Description
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1899
since deposited on 2021-10-17
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Citations
Metrics
Views
1899
since deposited on 2021-10-17
409
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations