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Articles
New SPM concept for accurate and repeatable tip positioning
Publication:
New SPM concept for accurate and repeatable tip positioning
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Date
2009
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19796.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Duriau, Edouard
;
Clarysse, Marc
;
Moussa, Alain
;
Vanhaeren, Danielle
;
Eyben, Pierre
;
Hantschel, Thomas
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
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1906
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Acq. date: 2025-12-10
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Views
1906
since deposited on 2021-10-17
4
last month
2
last week
Acq. date: 2025-12-10
Citations